| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2000-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3d17b3b234ed1afa3d09270b5937c01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8dd453a0fe39db60cd22d8f45cc68c68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2132e7835e595c66ba9630c7812b12b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58c55c8a433fde54e93d7037d48817a8 |
| publicationDate |
2002-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6440635-B1 |
| titleOfInvention |
Low âKâ factor hybrid photoresist |
| abstract |
A photoresist having both positive and negative tone components resulting in a lower "k" factor than the single tone photoresist is disclosed. The hybrid resist may either have the negative tone resist or the positive tone resist as the major portion, while the other tone is a relatively minor portion. For examples, a positive tone resist may include a minor portion of a negative tone cross-linker or a negative tone resist may include positively acting functional groups. The hybrid resist of the present invention allows for wider exposure dosage windows, therefore increasing the yield or performance and line density. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8795556-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8900988-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7598022-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7192910-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8232198-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008020325-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8890318-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9490202-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9209126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9236298-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9245791-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8822137-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008113157-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9299847-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9054160-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343354-B2 |
| priorityDate |
1996-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |