| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b1c5f332dddaff914ed798fc54999535 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate |
2001-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab9e5d08bd064e27eb83314b9c9d4171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a18cc94d2493a8c3b97596f6a34f7e56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11848e79e2c1c4c71c4d5e70b693089c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cbd7f2d55db2eda074963443af15adf |
| publicationDate |
2002-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6439972-B2 |
| titleOfInvention |
Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method |
| abstract |
A polishing fluid comprising a distributed organic phase and a continuous aqueous phase, each phase comprising at least one complexing agent. The aqueous phase also having abrasive particles dispersed therein. Reaction products generated during polishing interact with the aqueous phase complexing agent to form water soluble metallic complexes, the water soluble metallic complexes diffuse to an organic/water interface where they release complexing agent molecules in the aqueous phase and generate metal ions which interact with the organic phase complexing agent to form organometallic complexes. Further disclosed is a polishing method, a semiconductor device and semiconductor device fabrication method utilizing the polishing fluid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7425172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005009448-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6864177-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7704122-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119324-A1 |
| priorityDate |
2000-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |