| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-906
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-74 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-83
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-74 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D1-83
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-39 |
| filingDate |
2001-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b7dd4f6a02d047c0f6a79c62e4fbabc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e85e9d13accd45fed9b4b8e1cbb690b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f797d9ab4687b94a03acb7212fff0b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ede1bb3bb3963fadba787c577b5bc80 |
| publicationDate |
2002-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6417147-B2 |
| titleOfInvention |
Cleaning agent composition, method for cleaning and use thereof |
| abstract |
An object of the present invention is to provide a new cleaning agent composition having excellent cleaning power for the surface contamination of a semiconductor wafer or various precisely worked instruments made of glass or ceramic, which is used in the manufacture of wafer; a method for cleaning a wafer; a semiconductor wafer having a surface cleaned by a cleaning method; and a method for manufacturing a semiconductor wafer. A semiconductor wafer is cleaned using a cleaning agent composition including a specific fluorine-containing anionic surfactant, a quaternary ammonium hydroxide and/or an alkanolamine. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007010411-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7365045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005098538-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005058953-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006042651-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008200361-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7922824-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9677179-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7621281-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005048663-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7063930-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2557147-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7063800-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765654-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005048663-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7700535-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9443713-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109694782-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008076690-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006229221-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009215658-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008011321-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076920-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7718009-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006177761-A1 |
| priorityDate |
2000-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |