| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb78b459e21bb4fd52850a12cab27387 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2000-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca12d56e0ba14bc09625df47ff79645d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e939baa125253597c8d42218d9afcac |
| publicationDate |
2002-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6399772-B1 |
| titleOfInvention |
Aluminum complex derivatives for chemical vacuum evaporation and the method of producing the same |
| abstract |
Organometallic compounds useful for forming aluminum films by chemical vapor deposition are disclosed. Also disclosed are methods of preparing the organimetallic compounds and methods of forming aluminum films. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007136186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004242811-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010093954-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007136184-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006161014-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7098339-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007149730-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8754177-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004132933-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7199072-B2 |
| priorityDate |
1998-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |