| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76895 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
1998-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c524d51a047a082ceac2277061e87930
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b56d002a26c150bf5aa47c765705fd1 |
| publicationDate |
2002-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6392264-B2 |
| titleOfInvention |
Semiconductor memory device and method of producing the same |
| abstract |
A semiconductor memory device has access transistors with a gate and a pair of impurity diffusion layers formed on a semiconductor substrate and memory capacitors with a storage node electrode and a cell plate electrode. The electrodes are connected to each other via a capacitive insulating layer made of a ferroelectric material. The storage node electrode has a surface covered with the capacitive insulating layer and is formed in a shape of column on one of the pair of impurity diffusion layers in a hole formed from an inter-layer insulating film covering the access transistor to the one of the pair of impurity diffusion layers. A upper surface of the column does not exceed the inter-layer insulating film. The storage node electrode formed in the hole face the cell plate electrode via the inter-layer insulating film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004150054-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005145917-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7732273-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008268606-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7064029-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10147719-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018138168-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007029598-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10923502-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010072531-A1 |
| priorityDate |
1997-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |