| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-516
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 |
| filingDate |
2000-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2aa374bb28ff4afa89f8b0ce7b067062
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_268755fa717e4ccb9f3e9f4d656d4157 |
| publicationDate |
2002-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6372518-B1 |
| titleOfInvention |
Method using unreactive gas anneal and low temperature pretreatment for fabricating layered superlattice materials and making electronic devices including same |
| abstract |
A coating of liquid precursor for forming a layered superlattice material is applied to a substrate, the substrate is dried and then pretreated using RTP at 450 ° C. for 5 minutes. Following the RTP, the substrate is annealed in an unreactive gas at a temperature not exceeding 800° C. then annealed in oxygen gas at a temperature not exceeding 800° C. for one hour to form a thin film of layered superlattice material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6518167-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8513130-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6790679-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003183859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7572684-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007117271-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6674110-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006281300-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6825517-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115613114-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6714435-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7034349-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006169592-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004141357-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7030435-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6888736-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004041186-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7894284-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008096328-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011143459-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7915172-B2 |
| priorityDate |
2000-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |