| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0534e551838bc80048214c5c27970d07 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2227-0369
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2221-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2223-013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2225-0123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-0631 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C9-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17C13-00 |
| filingDate |
2000-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd925282f310bbf8dbcbd27c6b111d3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_960d41275e6265d51a13b2cac00a055a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88e1b2d2afa7716c78871a1dd8be9293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_281a7cbd008b6e6043a52df741c53c2b |
| publicationDate |
2002-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6363728-B1 |
| titleOfInvention |
System and method for controlled delivery of liquefied gases from a bulk source |
| abstract |
Provided is a novel system and method for delivery of gas from a liquefied state. The system includes (a) a delivery vessel holding a bulk quantity of liquefied gas therein; (b) a heat exchanger disposed on the delivery vessel to provide or remove energy from the liquefied gas only; and (c) a pressure controller for monitoring and adjusting the energy delivered to the vessel. The system and method allow for controlled delivery of liquefied gas from a delivery vessel at a predetermined flow rate. Particular applicability is found in the delivery of gases to semiconductor process tools. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10563913-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003209016-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007204631-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6921858-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011236782-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10139157-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10495257-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103615661-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7778530-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I416028-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8447175-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007095210-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007097813-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9360163-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007097813-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7813627-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103615661-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10234076-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11155758-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-2011250747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100928521-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103629530-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014263357-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007007879-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9777960-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9267645-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011225986-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010018249-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010326537-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004089335-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9163785-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008000239-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9574711-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101188124-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009321416-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112013269-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9574822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009113893-A1 |
| priorityDate |
2000-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |