abstract |
A production method for forming a liquid spray head. A diaphragm is formed on a first surface of a substrate made of planar oriented (110) monocrystalline silicon. A piezoelectric element is formed by laminating a first electrode, a piezoelectric film and a second electrode arranged on the diaphragm. A liquid chamber is formed by etching so that is extends in one of the <1I2> direction and the <I12> direction at a predetermined position on a second surface of the substrate, which opposes the first surface thereof. |