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publicationDate 2002-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6345424-B1
titleOfInvention Production method for forming liquid spray head
abstract A production method for forming a liquid spray head. A diaphragm is formed on a first surface of a substrate made of planar oriented (110) monocrystalline silicon. A piezoelectric element is formed by laminating a first electrode, a piezoelectric film and a second electrode arranged on the diaphragm. A liquid chamber is formed by etching so that is extends in one of the <1I2> direction and the <I12> direction at a predetermined position on a second surface of the substrate, which opposes the first surface thereof.
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