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publicationDate 2002-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6344647-B1
titleOfInvention Miniaturized photoacoustic spectrometer
abstract A miniaturized photoacoustic spectrometer made from a series of stacked substrates. An infrared source is formed in a first substrate. A filter is formed in a second substrate. A micro-trough is machined in a third substrate and a microphone is formed in a fourth substrate. A fifth substrate has a metallic deposit for reflecting light emitted by the infrared source. Resin sealing is provided between the substrates.
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