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publicationDate 2002-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6340768-B1
titleOfInvention MOCVD precursors based on organometalloid ligands
abstract Volatile metal complexes with alpha-sila-beta-diketonate ligands containing haloalkyl, and particularly, perfluoroalkyl, substitutents are useful as metal precursors for chemical vapor deposition processes and as nanostructured materials containing fluorous domains.
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