| abstract |
Styrene derivatives of formula (1) are novel wherein R1 is H, F, C1-20 alkyl or fluorinated C1-20 alkyl, R2 in cis or trans conformation is F, C1-20 alkyl or fluorinated C1-20 alkyl, R3 is a phenol protecting group, p, q and r are integers in the range of 0<=p<5, 0<=q<5, 0<r<5, and 0<=p+q<5.Polymers obtained by polymerizing the styrene derivatives are useful as the base polymer of resist compositions. |