| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f022be4aec9038f7d9dbda7bb26caa6e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-064 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C17-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C17-2416
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K1-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C7-006 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C17-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C17-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C7-00 |
| filingDate |
1998-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59b87d38c7d3f99689a63b06c87c33f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_777f5cb588110207cb15a45001d56995
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b32f4a54a7b9f09aa4c2feb90d93018
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02133339496a877187663fecf897d2c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2933e9d408cb8ca0d822a88d71bf4644
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05612672ce8feb6453654720139be271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_904ff8fc5d3b17f7767eba37fe1b71f5 |
| publicationDate |
2001-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6329899-B1 |
| titleOfInvention |
Formation of thin film resistors |
| abstract |
A method is provided for forming a patterned layer of resistive material in electrical contact with a layer of electrically conducting material. A three-layer structure is formed which comprises a metal conductive layer, an intermediate layer formed of material which is degradable by a chemical etchant, and a layer of resistive material of sufficient porosity such that the chemical etchant for said intermediate layer may seep through the resistive material and chemically degrade said intermediate layer so that the resistive material may be ablated from said conductive layer wherever the intermediate layer is chemically degraded. A patterned photoresist layer is formed on the resistive material layer. The resistive material layer is exposed to the chemical etchant for said intermediate layer so that the etchant seeps through the porous resistive material layer and degrades the intermediate layer. Then, portions of the resistive material layer are ablated away wherever the intermediate layer has been degraded. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005069905-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7749299-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10981193-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018290171-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7384698-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7215235-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7629017-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003124259-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6383953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020030844-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003108664-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7732002-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007117271-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11117161-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003003604-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003016118-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008194063-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6632591-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8668848-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8167393-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8383014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009032285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004201446-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6824880-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6951666-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8333820-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8334464-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6713316-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005133910-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8597397-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8147621-B2 |
| priorityDate |
1998-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |