| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
1999-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0634a3d2319d50234918ecb91a653af4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c6a8652e260749baef255fd75bd72bb |
| publicationDate |
2001-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6319850-B1 |
| titleOfInvention |
Method of forming dielectric layer with low dielectric constant |
| abstract |
A method for forming a dielectric layer with a low dielectric constant (low-k) is described. A semiconductor substrate is provided. A dielectric layer is formed on the substrate. A doping step is performed on the dielectric layer. An annealing step is performed and a gas is simultaneously fed so that the dielectric layer is converted into the low-k dielectric layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6967158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2617050-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8449923-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004175922-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8147855-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7172965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006138665-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7348283-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002098210-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004087136-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7135408-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004235293-A1 |
| priorityDate |
1999-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |