| abstract |
A system and method for initiating and maintaining a plasma in a chamber, in accordance with the helicon dispersion relation, requires an antenna for radiating RF energy into the chamber. An interferometer, or some similar device, is used in the system to monitor the plasma density level in the chamber, as the plasma is being produced. The plasma density level is then used to control the variable characteristics of the RF energy in accordance with the helicon dispersion relation. |