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filingDate 2000-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2001-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6294309-B1
titleOfInvention Positive photoresist composition containing alicyclic dissolution inhibitors
abstract A positive photoresist composition comprising a polymer, a photoactived agent and an dissolution inhibitor represented by the following formula (1):wherein R1, R2, R3, R4, R5 and k are defined in the specification. The photoresist composition of the present invention is useful as a chemically amplified type resist when exposed to deep UV light from a KrF and ArF excimer laser.
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