| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2000-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d15e66b4617c59a6a83d13071be3c36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01948ad40e3ea52913e3224ee92148c9 |
| publicationDate |
2001-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6280902-B1 |
| titleOfInvention |
Positive working photoresist compositions comprising a nitrogen-containing cyclic compound |
| abstract |
A positive working photoresist composition is provided which comprises a resin which is converted to alkali-soluble from alkali-insoluble or alkali slightly soluble by the action of an acid; an acid generator; and a nitrogen-containing cyclic compound represented by the following formula (I):wherein X represents CH2 or C(=O), two of R1, R2, R3 and R4 represent a lower alkyl and the rest two represent hydrogen;gives a good profile with a smooth pattern side even on a substrate having a high reflection; andhas a wide focus margin and a good sensitivity and resolution. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8617784-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007275323-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6514664-B1 |
| priorityDate |
1999-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |