| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-26 |
| filingDate |
1999-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e70bb81a82587fafbcad900e3b438de6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f9dc21e323a7963e080620c3d6a0fc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74f1c78fc4527695667ef911657c50cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26e6321cc950b1fbad184b3152fb53d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a75004070acb4eb2c675c624191e72a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b319f5aed84b7ff7bc2c5df382dc7e86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5ef344c3f79cca4d65d00cf8ca1726c |
| publicationDate |
2001-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6251569-B1 |
| titleOfInvention |
Forming a pattern of a negative photoresist |
| abstract |
A new group of non-chemically amplified negative tone water/aqueous base developable (photo) resists based on redistribution of carbon-oxygen bonds in pendant ester groups of the polymers has been found. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008206676-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005074690-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9567493-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004063030-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7488565-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8153346-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7364834-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11312882-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10774241-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7148265-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6641975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11561471-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7767592-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004063026-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004063027-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006063107-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006057496-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7304190-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7323290-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005250045-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005250044-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8535872-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007152305-A1 |
| priorityDate |
1999-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |