| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_57341227c065dbddd1d3cf801bbaa86a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-952 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
1999-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e24998c5ecec6ad5dd1d2d4d1092c6d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_520f875f5d4e8110130be94d76d6ad77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edd14b162e2a5fa4ec6fc7fa49283249 |
| publicationDate |
2001-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6245656-B1 |
| titleOfInvention |
Method for producing multi-level contacts |
| abstract |
The present invention relates to a method for overcming problems of amplified exposure light interference from shrinked devices and difficulties of photolithographic and etching process control due to multi-level contacts. The present invention combines reflective lights from multiple levels into one single light and reduces interference of reflective lights by introducing a reflective coating and an anti-reflective coating of SiON/Ti or SiON/TiN/Ti which further serve as an etching hard mask for avoiding overetching. The process windows are expanded. Semiconductor devices can be further shrunk and production yields an be improved. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7446415-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9000562-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7098128-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011227195-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005142576-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6384481-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6559044-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046453-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006099632-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046454-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9312325-B2 |
| priorityDate |
1999-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |