http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6245610-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823475 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823493 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76892 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 |
| filingDate | 1999-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0cac3816eb5fc6b99b9527b48acdf83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bd6c3fff5e1b51cfb39656e8acd2082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ee2f0f3ada135209a3c1d0a2f5dcfa7 |
| publicationDate | 2001-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-6245610-B1 |
| titleOfInvention | Method of protecting a well at a floating stage |
| abstract | A method of protecting a well at a floating stage. In a first conductive type substrate, a second conductive type well is formed. A first conductive type heavily doped region and a second conductive type heavily doped region are respectively formed in the first conductive type substrate and the second conductive type well. These two heavily doped regions are electrically connected with each at an early stage of fabrication process to provide a protection from being damaged during subsequent plasma process or other processes. While forming a top metal layer of a multi-level interconnect, these two heavily doped regions are disconnected, that is, open to each other, to obtain a better electrical characteristic of the device or the integrated circuit formed on the substrate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004146701-A1 |
| priorityDate | 1999-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.