| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F30-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
1999-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f959c41333fdf7037af4c18afc2e3a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a85792c08fda897d90724d6801748374
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5ef344c3f79cca4d65d00cf8ca1726c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5034de5c44f231fa3145c2e9ec9f776f |
| publicationDate |
2001-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6171757-B1 |
| titleOfInvention |
Organometallic polymers and use thereof |
| abstract |
Compositions comprising a polymer of organometallic polymerizable monomer acid or ester are useful as resists and are sensitive to imaging irradiation while exhibiting enhanced resistance to reactive ion etching. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6436605-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112462572-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9017923-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9023586-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015145144-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11143961-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009269678-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014170560-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022121888-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014170563-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10599032-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007068617-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10613441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2894691-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3177966-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11487199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3561596-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10234764-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10423068-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021099051-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017242338-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7923177-B2 |
| priorityDate |
1999-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |