| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d4ada69388e0a1b68daaf536597c732 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-291
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-81 |
| filingDate |
1994-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3edb3695bb18d4f7e2edbce27b43fe98 |
| publicationDate |
2001-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6171703-B1 |
| titleOfInvention |
Hermetic substrate coatings in an inert gas atmosphere |
| abstract |
The present invention relates to a method of forming a ceramic or ceramic-like coating on a substrate in the absence of oxygen. The method comprises coating the substrate with a solution comprising a solven and one or more preceramic materials selected from the group consisting of hydrogen silsesquioxane and hydrolyzed or partially hydrolyzed R x Si(OR) 4-x wherein R is independently selected from the group consisting of alkyl, aryl and unsaturated hydrocarbons and x is 0-2. The solvent is evaporated and a preceramic coating thereby deposited on the substrate. The preceramic coating is then ceramified by heating the coated substrate to a temperature of between about 500 up to about 1000° C. under an inert gas atmosphere to thereby produce a ceramic or ceramic-like coating on the substrate. The process of the invention is useful for forming protective coatings on any substrate prone to oxidation at the temperature necessary for ceramification. The present invention also relates to the formation of additional ceramic coatings on the ceramic or ceramic-like coating formed above. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015218876-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004166692-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010193353-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9050622-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8435605-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7749811-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007040501-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6576300-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6759133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008048178-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8435604-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004080732-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009324830-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011296771-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009121333-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8950162-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008206589-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7722929-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008149924-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10119327-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7829147-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9546513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9540863-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8115326-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007252526-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8304990-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11035168-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6558755-B2 |
| priorityDate |
1989-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |