| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3dbe3ee3084af91894720bb22377fdf6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31725
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2933
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-294
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2958 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-447
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D167-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D167-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D4-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F4-06 |
| filingDate |
1998-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_817340bbc66ba0fefcf57b182588a92a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e51d439ba30d9aec6ed324068575236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a72bb2b782b87c3a769201e9df2f818
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0e609bfa8c1e4718b247c7af3635158e |
| publicationDate |
2000-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6159600-A |
| titleOfInvention |
Oxygen plasma resistant polymer for electrical devices |
| abstract |
In one embodiment, the present invention relates to a substrate for an electrical device including a coating, wherein the coating comprises an oxygen plasma resistant polymer prepared from a mixture containing a polymerization material and a polycondensation product of a partially hydrolyzed chelated metal oxide precursor. In another embodiment, the present invention relates to a component for an electrical device comprising an oxygen plasma resistant polymer prepared from a mixture containing a polymerization material and a polycondensation product of a partially hydrolyzed chelated metal oxide precursor. In yet another embodiment, the present invention relates to a microelectronic device comprising an oxygen plasma resistant polymer prepared from a mixture containing a polymerization material and a polycondensation product of a partially hydrolyzed chelated metal oxide precursor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6700234-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005052051-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005113491-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6680120-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6348299-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002050746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6261687-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6960850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6224979-B1 |
| priorityDate |
1997-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |