| abstract |
Intermetal level dielectrics comprise fluorinated polydimethylenenaphthalene derived from the following monomers wherein each of R 1 , R 2 , R 3 , and R 4 is selected from the group consisting of H, F, and fluorocarbon groups ##STR1## The dielectric and oxides may be between metal lines. Fluorination of the polydimethylenenaphthalene lowers dielectric constant and increases working temperature. |