patent/US-6146227-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6146227-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a8fbb3f3e1aeee06ce67f0227e9c4e8
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-842 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-133 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30469 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C2213-81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-876
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B32-162
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-12
filingDate	1999-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2000-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd4f0487e517ede15b8ba5b0f751d443
publicationDate	2000-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6146227-A
titleOfInvention	Method for manufacturing carbon nanotubes as functional elements of MEMS devices
abstract	A system and method for manufacturing carbon nanotubes as functional elements of MEMS devices. The method of the present invention comprises the steps of preparing a MEMS substrate for synthesis of a carbon nanotube. A nanosize hole or catalyst retaining structure is fabricated on the MEMS substrate in which a nanotube catalyst is deposited. A nanotube is then synthesized within the nanosize hole.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004022943-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8815332-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8809230-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007518067-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010200836-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1551760-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005140261-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7730547-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011038470-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006213877-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7453789-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6452171-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009022977-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003185985-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006148370-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03085700-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6401526-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7005264-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9494615-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6831017-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8623288-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006071165-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006078705-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110592556-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006103406-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005244820-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6574130-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005151536-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004018139-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02079514-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6636050-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7344691-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004234445-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I420628-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004009308-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002172963-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004245224-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005036937-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8278055-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7872352-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004126491-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003207326-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7915066-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6250984-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7943847-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8431816-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004090162-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004191978-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7422667-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6705154-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6962823-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007231795-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003218224-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008107892-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7658971-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005166960-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6420092-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03085700-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7296576-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007172409-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7396564-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007172410-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009173931-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6515325-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003157744-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6322713-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7402736-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004012932-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008211112-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7649665-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002180077-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004009115-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6764874-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7994422-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010132080-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003143327-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7691541-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8101976-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7634162-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7700157-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8790773-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8278653-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004072994-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6548313-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7623746-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8574892-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7241496-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6952651-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6986853-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9114993-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7244407-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745810-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009317597-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6836424-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7291466-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2250661-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2250661-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7544415-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7589880-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003224170-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002110177-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6864481-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6858891-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6835591-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7098056-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004175631-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7226663-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6656339-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03106030-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100416492-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010021650-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7547472-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6700550-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006253942-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6729923-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006088848-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6514113-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005046305-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011517366-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6887453-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004188738-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-02059392-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006230475-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7538015-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6777693-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002055010-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003232346-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005260453-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004101469-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004183421-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7479516-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005282229-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7744816-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006019247-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007125753-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8822000-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005118342-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6743408-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006061257-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6784028-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6706402-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7011771-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8030191-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110592556-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6716409-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1917958-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7073937-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7109703-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7187112-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8021967-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008121029-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10351230-B3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6871528-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6737939-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006103694-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6656369-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7151209-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6835613-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE44069-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6469425-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100372335-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101128219-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004012062-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8592338-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006286297-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007119372-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004129570-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE46771-E http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7754964-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6848320-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6765190-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7847207-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6354133-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007099311-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6422450-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8866307-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7115305-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005230356-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6878444-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6758957-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7737381-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6750438-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7112816-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7102277-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6643165-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6591658-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7786402-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008217302-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7491628-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008315746-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004005723-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007121476-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7081385-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6958216-B2
priorityDate	1998-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5973444-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9811588-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10203810-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127490147 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31423

Total number of triples: 224.