| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B31-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B31-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-06 |
| filingDate |
1999-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3eaaaa92be55437af8ee308cf15def38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19cd2007303540267ed66521d9b07601 |
| publicationDate |
2000-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6134385-A |
| titleOfInvention |
Water free furnace tube with self-heating quartz plug |
| abstract |
A furnace tube with quartz plug is configured to have an oxidation performed therein, and at least one elongated protruding portion with an opening on one side of the tube. The furnace also includes a quartz plug with a portion thereof inserted inside the elongated protruding portion, and with another portion thereof inserted into the tube. Accordingly, water resided in a gap between inner surface of the elongated protruding portion and outer surface of the quartz plug can be evaporated by self-heating of the quartz plug. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8574326-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011232191-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007006528-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7909899-B2 |
| priorityDate |
1999-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |