| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
1998-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec8b02d6c79265b2818aef11a65bd5fd |
| publicationDate |
2000-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6132939-A |
| titleOfInvention |
Method for forming photoresist pattern |
| abstract |
A method for forming a resist pattern comprising the steps of: exposing a chemically amplified resist film by use of a mask having a given pattern; forming a protective film made of a paraffin having a melting point of not higher than 10 DEG C. and a boiling point of not lower than 50 DEG C. on the surface of the chemically amplified resist film before or after exposing the chemically amplified resist film; and forming the given pattern in the chemically amplified resist film by developing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015225570-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6884298-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7018785-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008135842-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111912811-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111912811-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004053170-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8216762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119333-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111965129-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6485893-B1 |
| priorityDate |
1997-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |