| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B23-507
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B23-505 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B23-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 |
| filingDate |
1997-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9476d5a1f9a8e35d3ccfe3b44d493f70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_434905f8f8d4ef975a193b60975248ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbf829eb690f5e3a28278bf6023b9e57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2edfbe37dcaa06e4947a550eb319893 |
| publicationDate |
2000-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6132813-A |
| titleOfInvention |
High density plasma surface modification for improving antiwetting properties |
| abstract |
A method for modifying a substrate surface, including the step of applying a high density plasma to the substrate surface in the presence of a hydrofluorocarbon gas and a carrier gas to form an antiwetting layer on the substrate surface. Optionally, the method including a cleaning step of contacting the slider surface with a carrier gas for a period of time effective to clean the surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003047441-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010003420-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003062333-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008081129-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011010939-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6444275-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006144692-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005201945-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6724608-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003022513-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6908865-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007246472-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03035154-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003101993-A1 |
| priorityDate |
1997-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |