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filingDate 1998-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2000-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6127256-A
titleOfInvention Semiconductor device and method of manufacturing the same
abstract This invention is related to a metallization of Cu. n The semiconductor device comprises a first insulating layer having a groove in a surface thereof, a second insulating layer on a surface of the groove, made of a material having a low density of crystal defects in comparison with that of the first insulating layer, and a wiring layer buried in the groove, surrounded by the second insulating layer.
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