| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 |
| filingDate |
1999-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea93031516fb5c15c47b87f52fe4f681
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34b724eb889393ad216b3a66ed6a79aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2083d342992ef94225f2be9f572b945a |
| publicationDate |
2000-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6100415-A |
| titleOfInvention |
Purified alkoxide and process for purifying crude alkoxide |
| abstract |
A purified alkoxide from which volatile impurities causing polymerization and degradation of the alkoxide are removed to extremely low concentrations. The purified alkoxide can be obtained by distilling a crude alkoxide and stripping the distilled liquid alkoxide by applying ultrasonic vibration while passing an inert gas through the liquid alkoxide. A high quality thin insulating film excellent in flatness with few defects such as voids can be obtained by using the purified alkoxide of the present invention as a CVD material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011104653-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7195795-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008188679-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9000206-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005095361-A1 |
| priorityDate |
1998-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |