| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
1999-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da72b39809dc8d62eae0444d0428035a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_795e159ff410e4804830ad47b72f6452
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36e8fc14f9020ca0af186170a1ff18e5 |
| publicationDate |
2000-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6086951-A |
| titleOfInvention |
Method for forming metallic capacitor |
| abstract |
A method of forming metallic capacitor. The method includes forming a lower electrode for forming the capacitor and a metal conductive line over an inter-layer dielectric such that there are gaps between and on the sides of the lower electrode and the metal conductive line. Thereafter, a first oxide layer is formed that fills the gap, and then a second oxide layer is formed over the inter-layer dielectric. The second oxide layer is later patterned to form a cap oxide layer having an opening that exposes a portion of the lower electrode. Subsequently, a thin dielectric layer is formed over the lower electrode and the cap oxide layer. Finally, an upper electrode is formed over the thin dielectric layer filling the opening. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10161285-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6958509-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1454345-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012146491-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004256654-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005012223-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7233053-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8421353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10161286-A1 |
| priorityDate |
1999-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |