http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6074943-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76852
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
filingDate 1998-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2000-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12480d3621a2e231366fd8505a2eafad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de5757854ea0cf9342fff36f249988fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cac5d99575602c80d6edb7035524e0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d334be65e45813f25de2d1d697a90d5f
publicationDate 2000-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6074943-A
titleOfInvention Sidewalls for guiding the via etch
abstract A structure and method to direct the via 270 etch to the top of the interconnect 210, by using a sidewall layer 240, preferably TiN, and thus preventing the etching down the side of the interconnect 210 and exposure of materials residing between the interconnects 210.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002001943-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004161892-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6307266-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6589711-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008182769-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6893961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005181595-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6355983-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6184584-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6955979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008283932-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6566211-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7709349-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7071557-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6444542-B2
priorityDate 1997-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5756396-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5827437-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5641708-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559362
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5352426
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID434418
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93091
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524915
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID434418
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419491804

Total number of triples: 45.