| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
1999-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_601ba4a71019c4ad5d4dff3748ba6624 |
| publicationDate |
2000-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6060213-A |
| titleOfInvention |
Positive-working photosensitive composition |
| abstract |
The present invention provides a positive-working photosensitive composition which comprises (a) a basic nitrogen-containing compound having a polycyclic structure represented by formula (I) and (b) at least one of compounds represented by formulae (II) to (IV) defined in the specification: wherein Y and Z may be the same or different and each represent a straight-chain, branched or cyclic alkylene group, which may contain a hetero atom or may be substituted. The positive-working photosensitive composition which exhibits no reduction of width of resist pattern or no T-top deformation of surface shape of resist pattern with time between after exposure and heat treatment without causing sensitivity drop. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7402373-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005282094-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008166666-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7608383-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6319843-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6265135-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6846610-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6210856-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007039346-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004067615-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7374859-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6319655-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1158363-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010261116-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005227168-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7759044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6461789-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6605409-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008153034-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100773335-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101288027-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6806022-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008274430-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6723483-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6777158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007039346-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6818380-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004137364-A1 |
| priorityDate |
1998-03-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |