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publicationDate 2000-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6033596-A
titleOfInvention Multi-oxidizer slurry for chemical mechanical polishing
abstract A chemical mechanical polishing slurry comprising a first oxidizer of urea hydrogen peroxide, a second oxidizer, an organic acid, and an abrasive, and a method for using the chemical mechanical polishing slurry to remove titanium, titanium nitride, and an aluminum alloy containing layer from a substrate.
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