| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-19 |
| filingDate |
1995-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae281fbea8ffb41e89c25b8f10f492b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fb24172d2f5af5130ddddfbae19a8d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d0e7f16b495ccd5079711eea70efd9c |
| publicationDate |
2000-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6028020-A |
| titleOfInvention |
Single crystal quartz thin film and preparation thereof |
| abstract |
A single crystal quartz thin film having a thickness of 5 nm to 50 μm can be prepared by forming the thin film on a single crystal substrate by a sol-gel process and peeling the thin film from the substrate. The present invention can provide the single crystal quartz thin film at a low price without a large and complex apparatus. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10926513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6781290-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11718067-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014016506-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008296569-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2993580-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011212320-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7666764-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10186674-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005062134-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012088036-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9060560-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9982535-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10053795-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015176149-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10254611-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006270197-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9328788-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9982736-B2 |
| priorityDate |
1994-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |