| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cf065fc014dfde09786fec35e300e673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc2b03342511abc88f60c63f2acd96d0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02854
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0421
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02881 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01H5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-075 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01H5-00 |
| filingDate |
1997-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a521073a338f5d1adc0a3acc0103b05d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c74b66604e6ddbb0ec5e3f565eed2c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0ff5754370562678def6d6ba7d35cb3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_073a2affd1f18d8f92996162c94823e8 |
| publicationDate |
2000-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6019000-A |
| titleOfInvention |
In-situ measurement of deposition on reactor chamber members |
| abstract |
A system is disclosed that employs ultrasonic waves to perform in-situ measurements to determine the properties of films deposited on substrates in the course of various semiconductor or processing steps. In one embodiment a single transducer excites incident acoustic waves at multiple frequencies that reflect from the films. The reflected waves are received by the same transducer. An analysis system determines the phase shift of the received reflected waves and, based on the phase shift, determines the film properties. Other embodiments employ distinct source and receiving transducers. Embodiments are also disclosed that compensate the measured phase shift for temperature variations in the substrate. In one such system, temperature compensation is performed based on the processing of phase measurements made at multiple frequencies or incidence angles or with multiple ultrasonic modes. The disclosed techniques are equally applicable to determining the degree of erosion of chamber members. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008295867-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7283226-B2
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012199288-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7227292-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006274306-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9347139-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002165636-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0133208-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003016727-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017108680-A1
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006247818-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160007530-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004200049-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014170395-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020230270-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008215248-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10113949-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102230735-B1 |
| priorityDate |
1997-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |