| abstract |
Disclosed is an apparatus for manufacturing an electrolytic ionic water for treating a substrate, comprising an electrolytic cell including an anodic chamber and a cathodic chamber partitioned from the anodic chamber by a porous membrane, a first carbon electrode housed in the anodic chamber, a second carbon electrode housed in said cathodic chamber, apparatus for supplying an electrolyte solution prepared by dissolving a supporting electrolyte in pure water or ultra pure water into the electrolytic cell, apparatus for applying a DC voltage between the first and second carbon electrodes and so as to electrolyze the electrolyte solution, thereby to form an oxidizing ionic water in the anodic chamber and a reducing ionic water in the cathodic chamber, a first discharge port for discharging the oxidizing ionic water from within the anodic chamber, and a second discharge port for discharging the reducing ionic water from within the cathodic chamber. |