| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-723
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-581 |
| filingDate |
1998-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0bdfed7925b9353181f1d1bec47c66b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9c1e15af8ac02a67e4fcbaf1f3045f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f094cc9b8191e358d30e992b465b84c |
| publicationDate |
1999-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5993699-A |
| titleOfInvention |
Aluminum nitride based composite body electronic functional material, electrostatic chuck and method of producing aluminum nitride based composite body |
| abstract |
This invention provides an aluminum nitride based composite body comprising aluminum nitride crystal grains and gamma -alumina type crystals in which the aluminum nitride crystal grains has a specified oxygen content as measured by means of an X-ray microanalyzer and a specified spin amount per unit mg of aluminum obtained from a spectrum measured by an electron spin resonance method as well as a method of producing the same. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012038038-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8791566-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6225249-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9190189-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013149530-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013045596-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005215415-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130087481-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6486085-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009283933-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7338723-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3012345-A1 |
| priorityDate |
1997-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |