| abstract |
Gettering enclosures for semiconductor packages, comprising an enclosure having a cavity for accommodating a semiconductor device; a gettering chamber (disposed above the semiconductor device) communicating with the cavity, comprising a getter precursor secured to the cavity and spaced from a wall of the cavity, wherein the wall is transparent to laser light so as to allow a beam of laser light to strike the getter precursor and sputter same on the walls of the gettering chamber. |