http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5910015-A

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filingDate 1998-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1999-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1999-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5910015-A
titleOfInvention Thin film transistor and manufacturing method of the thin film transistor
abstract The present invention is directed to a thin film transistor (TFT) structure having a channel region formed of a crystallized SiGe and is to provide a thin film transistor having a large carrier mobility. In this case, a channel region (4) is formed of a crystallized SiGe thin film.
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priorityDate 1992-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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