http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5893046-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da97a947c9a481ca2deb561d4496e93c |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-27 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 |
| filingDate | 1996-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1999-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5990f8bef6cf0b6b567a9412d07a879 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be656f12dc1aac01c315b4b2f54ee3de |
| publicationDate | 1999-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-5893046-A |
| titleOfInvention | Real time monitor of reacting chemicals in semiconductor manufacturing |
| abstract | A method and apparatus provide for monitoring and controlling a chemical process with a chemical substance adapted for treatment of a semiconductor device. The chemical substance is held in a container. The process of monitoring is provided by transmitting a light or other electromagnetic energy from a source located within the container through the chemical substance. The electromagnetic energy transmitted through the chemical substance is sensed with a photosensor or a photosensor fiber located within the container. A comparison to a standard is made of the result of the sensing by spectrum analysis, with a passband filter between the source and the photosensor. The sensor may comprise a wavelength adjustable photosensor or a multiple wavelength photosensor. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005028932-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6539285-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8343227-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7351349-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008190557-A1 |
| priorityDate | 1996-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.