| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81851e105df9f5a9ad2b0a7c2783bcc0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
1997-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a0a6725fd647a9123b0e3fff1d64632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89700164c4fd8d37f2fc7daf447aa080
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fa5dfe545384808cbe53bc1478e2232 |
| publicationDate |
1999-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5891800-A |
| titleOfInvention |
Method for depositing a flow fill layer on an integrated circuit wafer |
| abstract |
An improved method for depositing a flow fill layer of an integrated circuit. Two flowlayers and two cap layers are deposited. The wafer is warmed between the deposition of the first cap layer and the deposition of the second flowlayer, to evaporate water from the first flowlayer. Preferably, each of the cap layers is deposited in two separate steps of plasma enhanced chemical vapor deposition, to inhibit crack formation in the flowlayers. Most preferably, after the depositions of each flowlayer, the flowlayer is planarized by flowing H2O2 thereupon. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7528059-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008026594-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7670961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6511923-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6429147-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6534396-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100431741-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007232063-A1 |
| priorityDate |
1996-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |