| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49016
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B06B1-0622 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B06B1-06 |
| filingDate |
1997-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f13dacae698841c38e56622dc841aa16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_343638f8cd2f548e310ddf0bc6a44106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d29bd8e1dff6ae23e71a20c6ed9f610 |
| publicationDate |
1999-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5865163-A |
| titleOfInvention |
Dicing saw alignment for array ultrasonic transducer fabrication |
| abstract |
An array ultrasonic transducer precursor includes a body of piezoelectric material with a dielectric substrate bonded to a surface of the body. Circuit elements supported on the dielectric substrate include, in an active region, physically parallel signal conductors arranged in a pattern with spaces between adjacent ones of the conductors. Dicing saw cuts made in these spaces define individual circuit elements within the piezoelectric body. The circuit elements outside the active region include a set of resistive alignment elements in predetermined positions with reference to the pattern of signal conductors. The transducer precursor is mounted in a dicing saw fixture, and initial cuts made with the dicing saw remove portions of the resistive alignment elements. Locations of the initial cuts with reference to the resistive alignment elements are determined by measuring resistances of the resistive alignment elements after the initial cuts. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6954024-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007261493-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8409102-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013104712-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003011277-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8476532-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3119534-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6945844-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012092838-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7536912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3900847-A1 |
| priorityDate |
1995-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |