| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d45d8247d5a549f38ad2053a24226b19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-148 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate |
1996-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a73ba93abf25259fa0d06508a83a604f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9322276b4d41eaa93e5ce8a832b03faf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_238513ecb0f91dff683f1857fb7e18c7 |
| publicationDate |
1998-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5849465-A |
| titleOfInvention |
Photosensitive titanium carboxydiketonate and titanium carboxyketoester precursor solutions and method of patterning integrated circuits using the same |
| abstract |
A photosensitive liquid precursor solution including titanium carboxyketoesters or titanium carboxydiketonates polymerizes upon exposure to ultraviolet radiation. The solution is applied to an integrated circuit substrate, masked, and exposed to ultraviolet radiation to pattern the liquid precursor film. Unexposed portions of the film are removed in a developer solution including alcohol and water. The remaining portion of the film constitutes a pattern that may be annealed to form a metal oxide. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6072018-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003031958-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004077530-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5980983-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7176114-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003190820-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004164293-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6258157-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006001064-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6576302-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004126711-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9502636-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10468249-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I587364-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1326136-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6007963-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003118947-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11062905-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005013335-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7074640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005013335-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7067346-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004077530-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014349834-A1 |
| priorityDate |
1996-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |