http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5837603-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_61080e1b5f97a1c2066cddcf8a2e877b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| filingDate | 1996-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29e9f5046f78f865b706154f873759fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6dee862d0a8893ae2b09de88dbc1fce2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f04c93d7f729ac4f1a4aca32c00d078b |
| publicationDate | 1998-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-5837603-A |
| titleOfInvention | Planarization method by use of particle dispersion and subsequent thermal flow |
| abstract | A method of smoothing irregularities in a surface of a semiconductor device using flowable particles which are dispersed onto the surface of the semiconductor device. The irregularities in the surface of the semiconductor device are filled with flowable particles smaller in size than the irregularities which are to be smoothed, and the particles are thereafter heated so that they flow and fill the irregularities, forming a smooth layer of flowable particle material which does not require polishing. The flowable particles may be mixed with non-flowable particles which are encapsulated in the layer of flowable particle material to form a homogeneous layer. The non-flowable particles may be augmentors which modify the properties of the layer. The particles may be dispersed with a spin-on process. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009250656-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6218318-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9912189-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9912189-A3 |
| priorityDate | 1996-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.