| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_040ec81c891acc3f3186f56cb99cf161 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-946 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2648 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544 |
| filingDate |
1996-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca3fdf214add43a868e99e5660e3a1c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_daa68f906fe6fa4731718bd60d7b52ab |
| publicationDate |
1998-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5834364-A |
| titleOfInvention |
Method of implementing of a reference sample for use in a device for characterizing implanted doses |
| abstract |
A reference sample for the calibration of a device for characterizing doses implanted on a wafer, consisting in defining a succession of at least two parallel strips on the wafer. The reference sample is produced by depositing a first implant mask on the wafer according to a pattern leaving a first strip accessible, performing a first ionic implant of a first dose, removing the first implant mask and depositing a second implant mask on the wafer according to a pattern leaving accessible the first strip as well as a second contiguous strip, performing a second ionic implant of a second dose, and removing the second implant mask. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5882947-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19932357-C2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19932357-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6046427-A |
| priorityDate |
1995-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |