patent/US-5766362-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5766362-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_41686a979f961bce6a9855b4b409a5b8
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3327 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3321
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32541
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
filingDate	1996-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1998-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d982ef6174bad1c42a382979237d68ea
publicationDate	1998-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5766362-A
titleOfInvention	Apparatus for depositing barrier film on three-dimensional articles
abstract	The invention relates to an apparatus for use in a Plasma Enhanced Chemical Vapor Deposition (PECVD) process whereby a coating of inorganic material is deposited on three-dimensional articles, including low melting temperature polymer articles. The coating possesses excellent gas and/or water vapor barrier properties.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9554968-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10537273-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11298293-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009004363-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9458536-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11148856-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9937099-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11066745-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9572526-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10577154-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9903782-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008139003-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10390744-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10363370-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005202263-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009082517-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10912714-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8512796-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11624115-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11077233-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8834954-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9863042-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11406765-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10016338-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9664626-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11123491-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9662450-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11344473-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11116695-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10189603-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9764093-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9878101-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9545360-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11724860-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9272095-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11684546-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7985188-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10537494-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802603-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10201660-B2
priorityDate	1996-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962

Total number of triples: 64.