http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5759638-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d953eeb72e9f19aecf474deecee9d36 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4846 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-16 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10 |
| filingDate | 1995-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2dd99bc3893a13c615ecce30e6e67163 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aac28c61bcc75dc0c538418db46df69e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0327e66b2157142cec831559253f5f95 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_526e0ea0d727b2f4351d8268eae29c46 |
| publicationDate | 1998-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-5759638-A |
| titleOfInvention | Process for forming electronic circuit |
| abstract | PCT No. PCT/JP95/00752 Sec. 371 Date Mar. 4, 1997 Sec. 102(e) Date Mar. 4, 1997 PCT Filed Apr. 18, 1995 PCT Pub. No. WO96/08127 PCT Pub. Date Mar. 14, 1996The present invention relates to a process for forming an electronic circuit, which comprises coating a polyorganosilane on at least one surface of a substrate for forming an electronic circuit, followed by drying to form a solid state polysilane thin film, masking a portion for forming a circuit of said thin film and oxidizing a remaining portion to form an insulating portion, and then doping an oxidizing substance to the portion subjected to masking to form a conductive portion, and in order to oxidize a partial portion of the thin film, said thin film is irradiated with UV light in the presence of oxygen, preferably, in the oxidizing step, by carrying out partial oxidation while controlling an oxidation degree, the remaining portion is converted into three or more kinds of portions having different volume resistivities. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014088189-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005153562-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6998332-B2 |
| priorityDate | 1994-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 89.