http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5747117-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fc84bb6cfe58a2d191be85ae99845900 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-01 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-00 |
| filingDate | 1997-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_713faedec8c5782c32dba43458e986d9 |
| publicationDate | 1998-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-5747117-A |
| titleOfInvention | Method of applying a film to a substrate |
| abstract | A film is applied to a substrate in accordance with a predetermined pattern by applying a solution of a copolymer of fluoropolymers dissolved in a solvent onto the surface of the substrate; curing and annealing the solution to boil off the solvent and form a copolymer film on the substrate; depositing a thin metal film on the copolymer film; patterning the thin metal film by a photoresist etching process to expose the underlying copolymer film in accordance with the predetermined pattern; removing the exposed copolymer film so that the underlying substrate is exposed in accordance with the predetermined pattern; removing any remaining thin metal film; depositing the film to the remaining copolymer film and exposed substrate; then removing the remaining copolymer film and any film applied thereon by ultrasonic cleaning. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6552841-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6258419-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6253441-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6540836-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6413319-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007231156-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022201387-A1 |
| priorityDate | 1997-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.