| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03627f82d4edc6567f9627df6efdde5d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D311-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D311-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D335-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D335-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D311-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F12-30 |
| filingDate |
1997-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6745f6950f9bbbb7f336b35242308d6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdb73101afa68890e03ce5028170658b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be252dabb21e1880d2b15d8ada755120
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a128a770ab51e33eae94da2d510acec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7433cf19ca48fb73fe2c8bdaa50e1e20 |
| publicationDate |
1998-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5739295-A |
| titleOfInvention |
Photoactive coumarin sulfonate compounds |
| abstract |
A new class of 3-diazo-3,4-dihydrocoumarin compounds which are useful as photoactive compounds in a wide variety of applications including photoresists and other opto-electronic applications are disclosed and claimed. Preferred embodiments include 6-sulfonyl-3-diazo-4-oxo-3,4-dihydrocoumarin esters. These compounds exhibit very high photosensitivity in the deep ultraviolet (DUV) region (ca. 250 nm), and therefore, are useful as photoactive compounds in DUV photoresist formulations. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2660889-A3 |
| priorityDate |
1997-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |