abstract |
A tetraphenol compound represented by the formula (I): <IMAGE> (I) wherein R1, R2, R3 and R4 represent hydrogen 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl and a method for producing the compound are provided, and the compound can be used as a photosensitizer for a positive resist which exhibits superior properties. |